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FTZKDM-998 vacuum coating machine parameters
Vacuum coating technology is characterized by low temperature and high deposition rate, which is widely used in conductive film, optical film, protective film, decorative film and many other aspects. This equipment is a collection of magnetron sputtering and arc source as one of the more advanced production equipment, can produce different specifications of metal film products.
Main technical index
1 Overall dimensions :3200x1600X2438mm(L x W X H)
Vacuum outdoor size: medium 998x700mm(with water cooling)
2 Ultimate vacuum: 6.7x10-4Pa
3 Restore the vacuum degree: clean the empty furnace from the atmosphere to 6.7x10-³ Pa≤30 min
4 Pressure rise rate :1Pa/h(clean empty furnace)
5 Power: magnetic control source power :10KVA
Arc power supply :3KVA
6 Rectangular magnetron target size :384x131x12mm
7 arc source target size: Phi 100x70mm
8 Baking temperature :0~500℃
9 Cooling water: flow :20~35L/min
10 Charging system: mass flowmeter 3 way display